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导模法生长晶体研究进展
作者:杨新波 李红军 徐军 程艳 唐慧丽 周国清  
单位:中国科学院上海光学精密机械研究所 中国科学院上海光学精密机械研究所 中国科学院上海光学精密机械研究所 中国科学院上海光学精密机械研究所 中国科学院上海光学精密机械研究所 中国科学院上海光学精密机械研究所 上海201800 中国科学院研究生院 北京100039 上海201800 上海201800 上海201800 中国科学院研究生院 北京100039 上海201800 中国科学院研究生院 北京100039 上海201800 
关键词:导模法  蓝宝石  硅晶体 
分类号:O782
出版年,卷(期):页码:2008,36(S1):222-227
DOI:
摘要:
导模法是一种极具应用潜力的晶体生长方法,具有生长速度快,加工成本低的优点,广泛用于生长各种形状的晶体。对导模法的原理、特点和发展历史进行了简单介绍,着重论述了导模法在生长有形蓝宝石和硅晶体中的发展和应用,对目前导模法生长晶体过程中存在的问题做了简单的介绍。
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The edge-defined film-fed crystal growth method (EFG) is considered an excellent method and it is widely used for grow- ing shaped crystals because of its fast growth speed and low processing cost.The principle,characteristics and history of the EFG method are reviewed,the application of EFG in shaped crystal growth,such as sapphire and silicon,is discussed in particular.The problems in EFG growth crystals are discussed.
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基金项目:
国家863计划项目(2006AA03A104);; 国家自然科学基金(60607015)资助项目。
作者简介:
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