首页期刊信息编委及顾问期刊发行联系方式使用帮助常见问题ENGLISH
位置:首页 >> 正文
常压化学气相沉积法制备二氧化钛薄膜的沉积工艺及薄膜均匀性
作者:庞世红 王承遇 马眷荣 马振珠  
单位:中国建筑材料科学研究总院 大连工业大学  
关键词:常压化学气相沉积  二氧化钛  沉积速率  薄膜均匀性 
分类号:TB383.2
出版年,卷(期):页码:2010,38(1):64-67
DOI:
摘要:

利用常压化学气相沉积法在浮法玻璃表面制备了二氧化钛薄膜。研究了水蒸气、氧气含量和衬底温度以及反应器与衬底的距离对薄膜制备过程中沉积速率的影响。结果表明:当水蒸气质量浓度为50mg/L。氧气含量为总气体流量的8%时,薄膜的沉积速率可达30nm/s,随着衬底温度从300℃升到600℃,薄膜的沉积速率从15nm/s增加到30nm/s;然而随着反应器与衬底的距离从2mm增加到12mm,薄膜的沉积速率从30nm/s降到10nm/s,但大面积薄膜层的厚度差从10nm降低到2nm,薄膜比较均匀。

why women cheat on husbands online link
amoxicillin amoxicillin amoxicillin

Titanium dioxide film was deposited on a float glass surface by an atmosphere chemical vapor deposition method.The effects of the water vapor,oxygen concentration,substrate temperature and the distance between the reactor and the substrate on the deposition rate were investigated.It is indicated that the deposition rate can be achieved up to a maximum value of 30nm/s when the water vapor concentration is 50mg/L and the oxygen flux is 8% of the total gas flow.The deposition rate can be enhanced from 15 to 30nm/s when the substrate temperature is increased from 300 ℃ to 600 ℃.Furthermore,when the distance between reactor and substrate is increased from 2 to 12mm,the deposition rate is declined from 30 to 10nm/s,and the thickness difference of large film is decreased from 10 to 2nm,indicating the improvement of the uniformity of film.

women want men signs of unfaithful husband how do i know if my wife cheated
online reason why husband cheat married woman looking to cheat
my husband cheated on me redirect women who cheat on husband
open reasons why married men cheat My husband cheated on me
基金项目:
作者简介:
how to cheat women who want to cheat wife cheat story
women want men how to cheat how do i know if my wife cheated
redirect how to cheat why women cheat on men they love
sumatriptan side effects sumatriptan side effects sumatriptan side effects
参考文献:

[1]HOFFMANN M R,MARTIN S T,CHOI W Y,et al.Environmental applications of semiconductor photocatalysis[J].Chem Rev,1995,95:69-96. [2]LINSEBIGLER A L,LU G Q,YATES J T.Photocatalysis on TiO2surfaces:principles,mechanisms,and selected results[J].Chem Rev,1995,95:735-758. [3]AKIRA S,AKIRA T,TOMOHIRO I,et al.Nature of electrical junction at the TiO2/substrate interface for particulate TiO2film electrodes in aqueous electrolytes[J].J Phys Chem B,1998,102:6049-6055. [4]ZHAO J C,WU T X,WU K Q,et al.Photoassisted degradation of dye pollutants,3.degradation of the cationic dye rhodamine B in aqueous anionic surfactant/TiO2dispersions under visible light irradiation:Evi-dence for the need of substrate adsorption on TiO2particles[J].Envi-ron Sci Technol,1998,32:2394-2400. [5]袁昌来,董发勤.银镨复合掺杂二氧化钛纳米材料的光催化活性[J].硅酸盐学报,2007,35(6):736-740.YUAN Changlai,DONG Faqin.J Chin Ceram Soc(in Chinese),2007,35(6):734-760. [6]申乾宏,杨辉,高基伟.正硅酸乙酯对锐钛矿型二氧化钛多孔薄膜的室温制备及性能的影响[J].硅酸盐学报,2008,36(6):788-793.SHEN Qianhong,YANG Hui,GAO Jiwei.J Chin Ceram Soc(in Chi-nese),2008,36(6):788-793. [7]胡林华,戴俊,刘伟庆,等.锐钛矿相纳米TiO2晶体生长动力学及生长过程控制[J].物理学报,2009,58(2):1115-1119.HU Linhua,DAI Jun,LIU Weiqing,et al.Acta Phys Sin(in Chinese),2009,58(2):1115-1119. [8]汪冬梅,吴玉程,吕珺,等.Fe3+/Zn2+复合掺杂纳米TiO2的结构及光催化性能[J].硅酸盐学报,2008,36(11):1526-1532.WANG Dongmei,WU Yucheng,LU Jun,et al.J Chin Ceram Soc(in Chinese),2008,36(11):1526-1532. [9]魏凤玉,曾华灵,师彬,等.硫与铁共掺杂对二氧化钛光催化性能的影响[J].硅酸盐学报,2008,36(9):1272-1276.WEI Fengyu,ZENG Hualing,SHI Bing,et al.J Chin Ceram Soc(in Chinese),2008,36(9):1272-1276. [10]赵玉涛,刘晓燕,罗志华.纳米TiO2-CeO2复合薄膜的结构和光学性能[J].硅酸盐学报,2008,36(2):192-197.ZHAO Yutao,LIU Xiaoyan,LUO Zhihua.J Chin Ceram Soc(in Chi-nese),2008,36(9):192-197. [11]周武艺,曹庆云,唐绍裘.提高二氧化钛可见光光催化活性研究的进展[J].硅酸盐学报,2006,34(7):862-867.ZHOU Wuyi,CAO Qingyun,TANG Shaoqiu.J Chin Ceram Soc(in Chinese),2006,34(7):862-867. [12]林明贤,赵高凌,汪建勋,等.基板温度对常压化学气相沉积法制备TiO2复合薄膜性能的影响[J].硅酸盐学报,2007,35(11):1520-1525.LIN Mingxian,ZHAO Gaoling,WANG Jianxun,et al.J Chin Ceram Soc(in Chinese),2007,35(11):1520-1525. [13]郭清萍,武正簧,赵君芙,等.低压化学气相沉积法制备TiO2膜的研究[J].化学研究与应用,1999,11(1):13-16.GUO Qingping,WU Zhenghuang,ZHAO Junfu,et al.Chem Res Appl(in Chinese),1999,11(1):13-16. [14]唐伟忠.薄膜材料制备原理、技术及应用[M].北京:冶金工业出版社,1998:20-50.TANG Weizhong.The Principls,Technologies and Applications of Thin Solid Film(in Chinese).Beijing:Press of metallurgy industry,1998:20-50.

married cheaters how many women cheat click
open why do men cheat on their wife My husband cheated on me
服务与反馈:
文章下载】【加入收藏
中国硅酸盐学会《硅酸盐学报》编辑室
京ICP备10016537号-2
京公网安备 11010802024188号
地址:北京市海淀区三里河路11号    邮政编码:100831
电话:010-57811253  57811254    
E-mail:jccs@ceramsoc.com