硅酸盐学报

KTa_(1-x)Nb_xO_3三组分复合热释电薄膜的制备与性能研究

作者：吴会光王世敏傅晶张刚升

单位：湖北大学化学与材料科学学院湖北大学化学与材料科学学院湖北大学化学与材料科学学院湖北大学化学与材料科学学院武汉430062 武汉430062 武汉430062 武汉430062

关键词：钽铌酸钾多组分复合薄膜热释电性能

分类号：TB43

出版年,卷(期):页码：2002,30(4):482-485

DOI：

摘要：

利用多组分复合宽化铁电相变温区 ,使薄膜以高的热释电系数出现在较宽的温度范围。在BaTiO3/Pt/Ti/SiO2 /Si衬底上用溶胶 -凝胶法制备了 0 .5 μmKTa1 -x NbxO3(x =0 .45 ,0 .5 0 ,0 .5 5 )三组分等厚度的复合薄膜。 0 .5 μmKTN -0 .0 8μmBT薄膜在 2 8～ 72℃温度范围内 ,1.0kHz时 ,其εr=110 0 ,tanδ =1.2 %。在室温及 12 0kV/cm下极化 3 0min后 ,0 .5 μm复合薄膜在 2 8～72℃温度范围内热释电系数出现峰值 ,平均热释电系数 p =2 .7× 10 - 6 C/cm2 ·K ,电压响应优值Fv=8.99× 10 - 1 0 C·cm/J ,探测度优值Fd=2 7.0× 10 - 8C·cm/J,该薄膜工作温度范围很宽 ,是一种优异的热释电材料。

Thin films of multicomposition composite KTa 1- x Nb x O 3( x =0.45,0.50,0.55) for high pyroelectric coefficient and with wider temperature range were prepared by sol-gel method on BaTiO 3/Pt/Ti/SiO 2/Si substrates. The relative permittivity and dielectric loss of the composite films KTa 1- x Nb x O 3 0.5 μm thick-BaTiO 3 0.08 μm thick are 1 100 and 0.012 at 1.0 kHz in the temperature range from 28 ℃ to 72 ℃respectively. After polarizing in a field intensity of 120 kV/cm at room temperature, the 0.5 μm thick composite films exhibit an excellent pyroelectric behavior with an average pyroelectric coefficient of 2.7×10 -6 C/cm 2·K in above temperature range and optimal values of voltage response and detectivity of 8.99×10 -10 C·cm/J and 27.0×10 -8 C·cm/J respectively.

基金项目：

国家自然科学基金资助项目 (5 9972 0 0 8)~~

作者简介：

参考文献：

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