首页期刊信息编委及顾问期刊发行联系方式使用帮助常见问题ENGLISH
位置:首页 >> 正文
在玻璃上用强流脉冲离子束镀膜的工艺
作者:王承遇 刘永兴 马腾才 夏元良 
单位:大连轻工业学院玻璃及无机新材料研究所!大连116001 大连轻工业学院玻璃及无机新材料研究所!大连116001 大连理工大学离子束、电子束和激光束材料改性国家重点联合实验室!大连116024 大连理工大学离子束、电子束和激光束材料改性国家重点联合实验室!大连116024 
关键词:强流脉冲离子束  等离子体  锡掺杂氧化铟薄膜  原子力显微镜 
分类号:TQ171.68
出版年,卷(期):页码:2001,29(3):249-253
DOI:
摘要:
用强流脉冲离子束 (HIPIB)方法通过高强度脉冲离子束照射到锡掺杂氧化铟 (ITO)陶瓷靶材上产生的二次等离子体快速地沉积到室温玻璃基片上制得ITO薄膜 .经计算得知 :二次等离子体的密度约 10 2 0 atoms/cm3,温度以实验的电子能量 (ET0 )表示约为 1.4eV ,在玻璃表面瞬时沉积速率达 2cm/s,比其它传统镀膜方法大几个数量级 ;并且瞬间在玻璃表面产生约 2 2 0 0℃的高温 .经一次脉冲发射可制得 65nm厚的膜 .EDX数据表明薄膜与靶材的化学组成相近 .通过原子力显微镜 (AFM )图像分析膜的表面形貌 ,在 1μm× 1μm范围内 ,薄膜表面的均方根粗糙度为 1.3 85nm ,说明沉积后的膜表面平整度良好
women want men signs of unfaithful husband how do i know if my wife cheated
redirect unfaithful spouse why women cheat on men they love
read percentage of women who cheat signs of infidelity
doxycycline doxycycline doxycycline
abortion pill abortion pill abortion pill
Tin-doped indium oxide (ITO) films was deposited on glass substrate under room temperature by high intensity and high temperature plasma produced by the irradiation of high intensity (10 8 W/cm 2) pulsed (70 ns) ion beams onto an ITO ceramic target at a quick instantaneous deposition rate. The plasma density is calculated to be 10 20 atoms/cm 3 and the test electron energy value for the estimated plasma temperature( E T 0 ) is 1.4 eV. The deposition rate is about 2 cm/s, which is several orders of magnitude higher than that of any other conventional depositing technique. The temperature on the glass surface instantaneously reached 2 200 ℃ during the deposition. A film thickness of 65 nm on average is obtained in one shot. The EDX analysis indicates an identical composition of the target and films. The observation by atomic force microscopy (AFM) shows a smooth surface of the film as deposited.
married cheaters how many women cheat click
open cheat women go
sumatriptan side effects sumatriptan side effects sumatriptan side effects
基金项目:
作者简介:
read click link
my wife cheated on me now what men and women husband cheat
abortion pill abortion pill abortion pill
参考文献:
[1] RemnevGE ,IsakovIF ,OpekounovMS ,etal.Highintensi typulsedionbeamsourcesandtheirindustrialapplications[J] .SurfCoatTechnol,1999,114 :2 0 6— 2 12 . [2 ] YutakaS ,MeisoU ,ShigetoshiH ,etal.QuickdepositionofZnS :Mnelectroluminescentthinfilmsbyintensepulsedionbeamevaporation [J] .JpnJApplPhys ,1989,2 8:468— 472 . [3 ] MeliCA ,GrabowskiKS ,HinshelwoodDD ,etal.Filmde positionandsurfacemodificationusingintensepulseionbeams[J] .JVacSciTechnol,1995 ,A13 :1182— 1187. [4] YatsuiK ,GrigoriuC ,MasugataK ,etal.Preparationofthinfilmsandnanosizepowdersbyintensepulsedionbeamevapora tion[J] .JpnJApplPhys,1997,3 6:492 8— 493 4 . [5 ] KangX ,MasugaateK ,YatsuiK .Characteristicofablationplasmaproducedbyintensepulsedionbeam [J] .JpnJApplPhys,1994,3 3 :115 5— 1160 . [6] KangX ,MasugaateK ,YatsuiK .Ablationplasmatemperatureproducedbyintensepulsedion_beamevaporation[J] .JpnJApplPhys ,1994,3 3 :L10 41—L10 43 . [7] DawarAL ,JoshiJC .Semiconductingtransparentthinfilms———theirpropertiesandapplications[J] .JMaterSci,1984,19:1— 2 3 . [8] EvansRD .TheAtomicNucleus[M ] .NewYork :McGraw -HillPress,195 5 .18. [9] WeastR .HandbookofChemistryandPhysics[M] .Ohio :CRCPress,1974.F2 0 4,F2 12 . [10 ] HanabusaM ,SuzukiM ,NishigakiS .Dynamicsoflaser_inducedvaporizationforultrafastdepositionofamorphoussiliconfilms[J] .ApplPhysLett ,1981,3 8:3 85— 3 87. [11] YamanakaC .LaserKogaku[M] .Tokyo :Corona -SyaPress ,1981.174. [12 ] KimDH ,KimJ,HuangP .Anisotopictribologicalpropertiesofthecoatingonamagneticrecordingdisk[J] .ThinSolidFilms ,2 0 0 0 ,3 60 :187— 194
how do i know if my wife has cheated infidelity in marriage read
my wife cheated on me now what website husband cheat
服务与反馈:
文章下载】【加入收藏
中国硅酸盐学会《硅酸盐学报》编辑室
京ICP备10016537号-2
京公网安备 11010802024188号
地址:北京市海淀区三里河路11号    邮政编码:100831
电话:010-57811253  57811254    
E-mail:jccs@ceramsoc.com