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金刚石覆镍量对固着磨料研磨蓝宝石性能的影响
作者:徐胜 朱永伟 王加顺 左敦稳 
单位:南京航空航天大学机电学院 南京210016 
关键词:蓝宝石 镀镍金刚石 固结磨料研磨垫 研磨性能 
分类号:TG732
出版年,卷(期):页码:2015,43(4):0-0
DOI:
摘要:

 金刚石磨粒表面镀镍可以增强其与树脂的结合力。通过化学镀的方法在金刚石磨粒表面镀覆一层不同包覆率的Ni-P合金层,并制成了固结磨料研磨垫。采用CP-4型CMP抛光和测试系统,分别对蓝宝石进行粗研和精研加工,探索不同覆镍量对固着磨料研磨蓝宝石性能的影响。结果表明:金刚石磨粒表面镀镍可以改变其微观形貌;在实验范围内,随着金刚石包覆率的增加,摩擦系数、材料去除率和表面粗糙度呈现先增大后减小的趋势,其中粗研在包覆率为50%、精研在30%达到峰值;声发射信号呈现先减小后增大的趋势,其中粗研在50%、精研在30%达到谷值;粗研过程对包覆率的要求高于精研过程。

 Nickel plated on diamond grits surface can enhance its adhesive ability with resin. Diamond particles with different sizes were plated with a hydrophilic resin at different Ni-P coating rates by electroless plating. The morphology of coated particles was determined by scanning electron microscopy. The lapping tests on sapphire wafer as a work-piece were carried out in CP-4 CMP polishing and testing system. The effect of nickel coating rate on the lapping performance of sapphire in a fixed abrasive pad was investigated. The results show that the morphology of diamond particle changes after nickel electroless plating. The coefficient of friction, material removal rate and surface roughness of lapped work-piece firstly increases and then decreases with the increase of coating rate, and the maximum values appear at a coating rate of 50% for rough lapping and at a coating rate of 30% for fine lapping. The acoustic emission intensity firstly decreases and then increases with the increase of coating rate, and the minimum value appears at a coating rate of 50% for rough lapping and at a coating rate of 30% for fine lapping. The demand of diamond coating rate for rough lapping is higher than that for fine lapping.

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基金项目:
基金项目:国家自然科学基金(51175260和51375237);中央高校基本科研业务专项资金(NP2012506);江苏高校优势学科建设工程。
作者简介:
第一作者:徐胜(1991—),男,硕士研究生。通信作者:朱永伟(1967—),男,博士,教授。
参考文献:

 参考文献:

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