硅酸盐学报

金刚石覆镍量对固着磨料研磨蓝宝石性能的影响

作者：徐胜朱永伟王加顺左敦稳

分类号：TG732

出版年,卷(期):页码：2015,43(4):0-0

DOI：

摘要：

金刚石磨粒表面镀镍可以增强其与树脂的结合力。通过化学镀的方法在金刚石磨粒表面镀覆一层不同包覆率的Ni-P合金层，并制成了固结磨料研磨垫。采用CP-4型CMP抛光和测试系统，分别对蓝宝石进行粗研和精研加工，探索不同覆镍量对固着磨料研磨蓝宝石性能的影响。结果表明：金刚石磨粒表面镀镍可以改变其微观形貌；在实验范围内，随着金刚石包覆率的增加，摩擦系数、材料去除率和表面粗糙度呈现先增大后减小的趋势，其中粗研在包覆率为50%、精研在30%达到峰值；声发射信号呈现先减小后增大的趋势，其中粗研在50%、精研在30%达到谷值；粗研过程对包覆率的要求高于精研过程。

Nickel plated on diamond grits surface can enhance its adhesive ability with resin. Diamond particles with different sizes were plated with a hydrophilic resin at different Ni-P coating rates by electroless plating. The morphology of coated particles was determined by scanning electron microscopy. The lapping tests on sapphire wafer as a work-piece were carried out in CP-4 CMP polishing and testing system. The effect of nickel coating rate on the lapping performance of sapphire in a fixed abrasive pad was investigated. The results show that the morphology of diamond particle changes after nickel electroless plating. The coefficient of friction, material removal rate and surface roughness of lapped work-piece firstly increases and then decreases with the increase of coating rate, and the maximum values appear at a coating rate of 50% for rough lapping and at a coating rate of 30% for fine lapping. The acoustic emission intensity firstly decreases and then increases with the increase of coating rate, and the minimum value appears at a coating rate of 50% for rough lapping and at a coating rate of 30% for fine lapping. The demand of diamond coating rate for rough lapping is higher than that for fine lapping.

基金项目：

基金项目：国家自然科学基金(51175260和51375237)；中央高校基本科研业务专项资金(NP2012506)；江苏高校优势学科建设工程。

作者简介：

第一作者：徐胜(1991—)，男，硕士研究生。通信作者：朱永伟(1967—)，男，博士，教授。

参考文献：

参考文献:

[1] 王银珍, 彭观良, 刘世良, 等. 表面处理对蓝宝石衬底的影响[J]. 人工晶体学报, 2005, 34(3): 31–434. WANG Yinzhen , PENG Guanliang, LIU Shiliang, et al. Effect of Surface Treatment on Sapphire Substrate[J]. J Synth Cryst (in Chinese), 2005, 34(3): 31–434.

[2] 张泽芳, 刘卫丽, 宋志棠. 不同碱和分散剂对蓝宝石基片研磨的影响[J]. 半导体先进制造技术, 2012, 4(5): 267–269. ZHANG Zefang, LIU Weili, SONG Zhitang. Adv Semicond Manuf Technol (in Chinese), 2012, 4(5): 267–269.

[3] SALEM K Jonathan A, QUINN George D. Fractographic analysis of large single crystal sapphire refractive secondary concentrators[J]. J Eur Ceram Soc, 2014, 34(14): 3273–3276.

[4] 李鹏鹏, 李军, 王建彬, 等. 固结磨料研磨蓝宝石衬底的工艺研究[J]. 人工晶体学报, 2013, 42(11): 2258–2259. LI Pengpeng, LI Jun, WANG Jianbin, et al. J Synth Cryst (in Chinese), 2013, 42( 11): 2258–2259.

[5] 方莉俐, 郑莲, 吴艳飞, 等. 人造金刚石表面化学镀镍工艺[J]. 人工晶体学报, 2013, 42(9): 1870–1871. FANG Lili, ZHENG Lian, WU Yanfei, et al. T J Synth Cryst (in Chinese), 2013, 42(9): 1870–1871.

[6] PRAMANIKA A, NEOA K S, RAHMANA M, et al. Cutting performance of diamond tools during ultra-precision turning of electroless-nickel plated die materials[J]. J Mater Process Technol, 2003, 140(1/3): 308–310.

[7] 高涛, 彭伟, 姚春燕. 金刚石表面处理的应用和发展[J]. 金刚石与磨料磨具工程, 2004, 141(3): 6–9. GAO Tao, PENG Wei, YAO Chunyan. Diamond Abrasives Eng( in Chinese), 2004, 141(3): 6–9.

[8] 任春春, 林国兴, 梅天庆. 金刚石微粒表面化学镀镍[J]. 电镀与精饰, 2012, 34(10): 35–38. REN Chunchun, LIN Guoxing, MEI Tianqin. Plat Finish (in Chinese), 2012, 34(10): 35–38.

[9] 唐晓骁, 朱永伟, 付杰, 等. 铜粉含量对亲水性固结磨料抛光垫加工性能的影响研究[J]. 金刚石与磨料磨具工程, 2012, 32(4): 10–13. TANG Xiaoxiao, ZHU Yongwei, FU Jie ,et al. Diamond Abrasives Eng( in Chinese), 2012, 32(4): 10–13.

[10] 王成, 朱永伟, 徐俊, 等. 固结磨料抛光中不同抛光液组分对铜的加工性能的影响[J]. 金刚石与磨料磨具工程, 2013, 33(6): 2–3. WANG Cheng, ZHU Yongwei, XU Jun, et al. Diamond Abrasives Eng( in Chinese), 2013, 33(6): 2–3.

[11] 闫小青, 谢志龙, 樊保圣, 等. 基于表面粗糙度影响的摩擦声发射特性研究[J]. 摩擦学学报, 2011, 31(6): 587–589. YAN Xiaoqing, XIE Zhilong, FAN Baosheng, et al. Tribology (in Chinese), 2011, 31(6): 587–589.

[12] SHERRINGTON I, HAYHURST P. Simultaneous observation of the evolution of debris density and friction coefficient in dry sliding steel contacts[J]. Wear, 2001, 249: 162–187.

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