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热处理工艺对溶胶-凝胶法制备ZnO:Al薄膜光电性能的影响
作者:彭寿 金良茂 王芸 汤永康 甘治平 王东 石丽芬 单传丽 
单位:蚌埠玻璃工业设计研究院 浮法玻璃新技术国家重点实验室 安徽蚌埠 233000 
关键词:铝掺杂氧化锌薄膜 热处理 光电性能 溶胶–凝胶法 
分类号:
出版年,卷(期):页码:2015,43(4):0-0
DOI:
摘要:

 采用溶胶–凝胶法以提拉的方式在普通玻璃基底上制备出ZnO:Al(AZO)薄膜。通过X射线衍射仪、场发射扫描电子显微镜、方块电阻测试仪、霍尔效应测试仪、紫外–可见–红外分光光度计研究了薄膜物相、微观结构、光电性能;分析了不同热处理方式对于薄膜光电性能的影响。结果表明:经10次提拉所制备薄膜可见光透过率85%左右。热处理工艺的选择对于提升AZO薄膜的电学性能至关重要,相比于空气气氛和真空下的热处理,采用具有还原性的5% H2和95% N2气氛热处理得到了具有最好电学性能的AZO薄膜。在550 ℃还原气氛下保温60 min得到薄膜方块电阻约为300 Ω/□,电阻率约为3.3× 10–3 Ω?cm。

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 Aluminum doped zinc oxide (AZO) films were prepared on a glass substrate by a sol–gel dip-coating process. The phase, microstructure and electro-optical properties of AZO films were investigated by X-ray diffraction, field emission scanning electron microscope, four-probe resistance meter, Hall-effect tester and UV–visible–infrared spectrophotometer, respectively. The influence of heat treatment on the electro-optical properties of AZO films was also analyzed. The results show that the visible light transmittance of AZO films prepared by pulling for 10 times is 85%. The heat treatment is crucial for enhancing the electrical properties of AZO films, and the better electrical properties are obtained when AZO films are annealed in a mixed atmosphere of 5%H2 and 95%N2, compared to that with vacuum annealed or in air. The sheet resistance and resistivity of AZO films are 300 Ω/□ and 3.3×10-3 Ω?cm after annealed in a reducing atmosphere at 550 ℃ for 60 min. 

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基金项目:
基金项目:国家“973”计划(2012CB724608)资助项目。
作者简介:
第一作者:彭寿(1960—),男,教授级高工。通信作者:金良茂(1984—),男,高工。
参考文献:

 参考文献:

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