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热处理工艺对溶胶–凝胶法制备ZnO:Al 薄膜光电性能的影响
作者:彭寿 金良茂 王芸 汤永康 甘治平 王东 石丽芬 单传丽 
单位:蚌埠玻璃工业设计研究院 浮法玻璃新技术国家重点实验室 安徽 蚌埠 233000 
关键词:铝掺杂氧化锌薄膜 热处理 光电性能 溶胶–凝胶法 
分类号:TB34
出版年,卷(期):页码:2015,43(3):451-457
DOI:10.14062/j.issn.0454-5648.2015.04.13
摘要:

 采用溶胶–凝胶法以提拉的方式在普通玻璃基底上制备出ZnO:Al(AZO)薄膜。通过X 射线衍射仪、场发射扫描电子

显微镜、方块电阻测试仪、Hall 效应测试仪、紫外–可见–红外分光光度计研究了薄膜物相、微观结构、光电性能;分析了不
同热处理方式对于薄膜光电性能的影响。结果表明:经10 次提拉所制备薄膜可见光透过率85%左右。热处理工艺的选择对
于提升AZO 薄膜的电学性能至关重要,相比于空气气氛和真空下的热处理,采用具有还原性的5% H2 和95% N2 的混合气氛
热处理得到了具有最好电学性能的AZO 薄膜。在550 ℃还原气氛下保温60 min 得到薄膜方块电阻约为300 Ω/□,电阻率约
为3.3×10–3 Ω·cm。
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 Aluminum doped zinc oxide (AZO) films were prepared on a glass substrate by a sol–gel dip-coating process. The phase,

microstructure and electro-optical properties of AZO films were investigated by X-ray diffraction, field emission scanning electron
microscope, four-probe resistance meter, Hall-effect tester and UV–visible–infrared spectrophotometer, respectively. The influence of
heat treatment on the electro-optical properties of AZO films was also analyzed. The results show that the visible light transmittance
of AZO films prepared by pulling for 10 times is 85%. The heat treatment is crucial for enhancing the electrical properties of AZO
films, and the better electrical properties are obtained when AZO films are annealed in a mixed atmosphere of 5%H2 and 95%N2,
compared to that with vacuum annealed or in air. The sheet resistance and resistivity of AZO films are 300 Ω/□ and 3.3×10-3 Ω·cm
after annealed in a reducing atmosphere at 550 ℃ for 60 min.
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基金项目:
国家“973”计划(2012CB724608)资助项目。
作者简介:
彭 寿(1960—),男,教授级高级工程师。
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