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沉积温度对Na0.5Bi0.5TiO3 铁电薄膜结构与性能的影响
作者:宋建民1 2  帆2 代秀红1 梁杰通1  洁2  磊1 刘保亭1 
单位:1. 河北省光电信息材料重点实验室  河北大学物理科学与技术学院 河北 保定 071002  2. 河北农业大学理学院 河北 保定 071001 
关键词: 
分类号:钛酸铋钠薄膜;异质结;剩余极化强度;压电系数
出版年,卷(期):页码:2018,46(10):0-0
DOI:10.14062/j.issn.0454-5648.2018.10.03
摘要:

 利用脉冲激光沉积法和磁控溅射法在(001) SrTiO3 单晶基片上构架了铁电异质结电容器Pt/La0.5Sr0.5CoO3/Na0.5Bi0.5TiO3/

La0.5Sr0.5CoO3/SrTiO3(LSCO/NBT/LSCO/STO)。利用原子力显微镜(AFM)、X 射线衍射仪(XRD)、铁电测试仪和压电力显微镜
(PFM)研究了沉积温度对Na0.5Bi0.5TiO3(NBT)铁电薄膜的表面形貌、微结构和电学性能的影响。AFM 结果表明,NBT 薄膜晶
粒尺寸随着沉积温度的增加先变小后增大。XRD 结果显示,不同沉积温度下生长的NBT 薄膜均为(00l)择优取向结构。铁电
测试仪和PFM 结果表明,NBT 薄膜的铁电和压电性能随着沉积温度的增加先增大后减小,650 ℃生长的薄膜具有最高的剩
余极化强度(19.6 μC/cm2)和最大的有效压电系数(146 pm/V)。
基金项目:
作者简介:
参考文献:

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