硅酸盐学报

研磨液在氧化镓晶体研磨中的作用

作者：黄传锦1 2 周海2 朱永伟1 徐晓明2 李军1

单位：(1. 南京航空航天大学机电学院南京 210016 2. 盐城工学院机械学院江苏盐城 224051)

关键词：氧化镓晶体研磨研磨液晶体解理

分类号：O786; TN305.2

出版年,卷(期):页码：2019,47(1):0-0

DOI：10.14062/j.issn.0454-5648.2019.01.06

摘要：

氧化镓晶体易解理，严重阻碍了研磨过程中晶体表面质量的提升。根据摩擦学原理建立边界润滑磨损模型，探索了不同研磨液在研磨过程中的作用机理。针对晶体的解理特性，依据理论模型依次采用水、油作为研磨液对氧化镓进行加工实验研究。结果表明：首先水磨，晶体表面由粗研磨产生的解理现象得到有效抑制，表面粗糙度Ra由粗研磨后的325 nm降至70 nm；然后油磨，晶体表面的微解理缺陷逐步消失，表面粗糙度Ra由水磨后的70 nm降至24 nm。该研究为易解理晶体的精研磨提供有益参考。

It is difficult to achieve ultra-precision machining due to the cleavage properties of β-Ga2O3 (100) plane. The boundary lubrication wear model was established, and the mechanism of different lapping fluid in the lapping process was analyzed based on the tribological principle. In order to solve the cleavage problem of crystal, the process scheme of two-step lapping gallium oxide was designed. There were two steps in the lapping experiments, i.e., the crystal firstly lapped with water and then with oil. The results show that the surface roughness (Ra) decreases from 325 nm to 70 nm, and the micro-cleavage of the crystal surface alleviates when using water. The Ra decreases from 70 nm to 24 nm, and the micro-cleavage of the crystal surface becomes micro-scratches when using oil. This study provides a reference for processing the crystal with a cleavage property.

基金项目：

国家自然科学基金项目(51675457)；江苏省产学研前瞻性创新资金项目(BY2016065-55)

作者简介：

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