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(100)择优取向对0.935Bi1/2Na1/2TiO3-0.065BaTiO3-0.01Al6Bi2O12无铅压电薄膜的结构和性能影响
作者:范学敏         郝继功 
单位:(聊城大学材料科学与工程学院 山东 聊城 252059) 
关键词:压电薄膜 激光脉冲沉积 钛酸铋钠 取向 
分类号:TM282
出版年,卷(期):页码:2020,48(2):0-0
DOI:
摘要:

 通过激光脉冲沉积技术(PLD)在Pt(111)/Ti/SiO2/Si(简称Pt)和具有LaNiO3缓冲层的Pt(111)/Ti/SiO2/Si(简称LNO/Pt)两种衬底上制备了0.935Bi1/2Na1/2TiO3-0.065BaTiO3-0.01Al6Bi2O12(简称BNT–BT–AB)薄膜。利用X射线衍射仪、扫描电子显微镜、原子力显微镜和铁电分析仪等对薄膜的结构和性能进行了测试和表征。结果表明:Pt衬底上BNT–BT–AB薄膜为随机取向,晶粒形貌为立方块状,剩余极化强度2Pr=20.38 μC/cm2,介电可调为19%,局部有效压电系数d33*为130 pm/V;LNO/Pt衬底上BNT–BT–AB薄膜呈现高度的(100)择优取向,薄膜表面平整,剩余极化强度2Pr=21.25 μC/cm2,介电常数(700)和介电可调性(23%)均大于随机取向薄膜,d33*提高到150 pm/V。

基金项目:
国家重点研发计划项目(2016YFB0402701);国家自然科学基金项目(51502127)。
作者简介:
参考文献:

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