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TiO2-SiO2/SiO2双层复合薄膜制备及折射率调控
作者:马立云 金良茂 汤永康   苏文静 甘治平   
单位:(中建材蚌埠玻璃工业设计研究院有限公司 浮法玻璃新技术国家重点实验室 安徽 蚌埠 233000) 
关键词:减反膜 折射率 光学透过率 W型减反特性 
分类号:TB34
出版年,卷(期):页码:2020,48(4):0-0
DOI:
摘要:

 摘  要:采用溶胶?凝胶法制备了具有W型减反特性的TiO2-SiO2/SiO2复合薄膜,并分别调控了TiO2及TiO2-SiO2混合介质薄膜折射率,探索了不同制备条件对TiO2薄膜折射率的影响机理。通过场发射扫描电子显微镜、能谱仪、椭偏仪、紫外–可见-红外分光光度计研究了薄膜微观结构、薄膜组分、折射率和光学透过率,通过TFcal软件模拟了双层复合薄膜的光学透过率线型。研究表明:溶胶pH值对TiO2薄膜折射率影响显著,其影响的前驱体水解速率对折射率的影响占主要作用,并且随着pH值的增大薄膜折射率减小,而水/钛比对薄膜折射率影响不显著。在TiO2与SiO2混合溶胶中两者物质的量比为1.2:1.0时,获得可用于制备双层复合W型减反膜系底层的薄膜,其椭偏仪拟合测试折射率约为1.68。最终制备的复合TiO2-SiO2/SiO2薄膜实现了光学宽谱范围380~1100 nm的优良增透效果,最大透过率可达约97%。

基金项目:
安徽省科技重大专项(17030901085);安徽省重点研究与开发计划(1804a09020061)。
作者简介:
参考文献:

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