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类金刚石薄膜热稳定性及热磨损机理研究进展
作者:  袁军堂   汪振华 
单位:(南京理工大学机械工程学院 南京 210094) 
关键词:类金刚石 热稳定性 热磨损机理 
分类号:TG711
出版年,卷(期):页码:2020,48(4):0-0
DOI:
摘要:

 摘  要:类金刚石(DLC)薄膜作为典型的固体润滑剂,耐热性差一直是制约其高温服役性能以及产业化推进的主要原因之一。高温将直接影响DLC碳基骨架稳定性,进而限制其优异摩擦学性能的发挥。分别从DLC热稳定性影响因素、热稳定性研究方法以及热磨损机理研究进展3个方面展开介绍,分析未来的发展趋势,以期为DLC高温环境下服役性能研究提供技术参考。

基金项目:
国家自然科学基金(51675285); 江苏高校优势学科建设工程资助项目(PAPD);中央高校基本科研业务费专项资金(309181B8810,30919011206)。
作者简介:
参考文献:

 [1]CHEN L, GUO P, LI X, et al. Experimental and model studies about the lubrication of physisorbed isobutane molecules on hydrogenated diamond-like carbon films[J]. Surf Coat Tech, 2019, 357: 759−767.

[2]ARGIBAY N, BABUSKA T F, CURRY J F, et al. In situ tribochemical formation of self-lubricating diamond-like carbon films[J]. Carbon, 2018, 138: 61−68.
[3]ZHUANG W, FAN X, LI W, et al. Comparing space adaptability of diamond-like carbon and molybdenum disulfide films toward synergistic lubrication[J]. Carbon, 2018, 134: 163−173.
[4]石志峰, 郝丽静, 宁成云, 等。类金刚石和硅氮类薄膜在人工关节表面的摩擦性性能[J]. 硅酸盐学报, 2019, 47(4): 553−560.
SHI Zhifeng, HAO Lijing, NING Chengyun, et al. J Chin Cerem Soc, 2019, 47(4): 553−560.
[5]FLOSKY H, VOLLERTSEN F. Wear behavior of a DLC-coated blanking and deep drawing tool combination[C]//15th International Conference on Sheet Metal, Belfast, United Kingdom, 2013: 511−517.
[6]XU Y R, LIU H D, CHEN Y M, et al. In situ synthesized TiC-DLC nanocomposite coatings on titanium surface in acetylene ambient[J]. Appl Surf Sci, 2015, 349: 93−100.
[7]高波, 曾凡浩, 古一, 等. 航天发动机用GH4586镍合金表面含镍金属陶瓷涂层的结合与抗氧化性能[J]. 粉末冶金材料科学与工程, 2018, 23(5): 527−533.
GAO Bo, ZENG Fanhao, GU Yi, et al. Mater Sci Eng Pow Met (in Chinese), 2018, 23(5): 527−533.
[8]SU F, YUAN J, SUN F, et al. Analytical cutting model for a single fiber to investigate the occurrences of the surface damages in milling of CFRP[J]. Int J Adv Manuf Tech, 2018, 96(5−8): 2671−2685.
[9]ZENG Q F. Thermally induced superlow friction of DLC films in ambient air[J]. High Temp Mat Pr-Isr, 2018, 37(8): 725−731.
[10]GRIFFITHS C A, REES A, KERTON R M, et al. Temperature effects on DLC coated micro moulds[J]. Surf Coat Tech, 2016, 307: 28−37.
[11]ROBERTSON J. Diamond-like amorphous carbon[J]. Mat Sci Eng: R, 2002, 37(4−6): 129−281.
[12]ZEMEK J, HOUDKOVA J, JIRICEK P, et al. Surface and in-depth distribution of sp2 and sp3 coordinated carbon atoms in diamond-like carbon films modified by argon ion beam bombardment during growth[J]. Carbon, 2018, 134: 71−79.
[13]DONNET C, ERDEMIR A. Tribology of Diamond-Like Carbon Films: Fundamentals and Applications[M]. New York: Springer US, 2008.
[14]王永欣. 水环境用高性能类石墨碳基薄膜的制备及其特性研究[D]. 兰州: 中国科学院兰州化学物理研究所, 2011.
WANG Yongxin. Preparation and properties of the high performance graphite-like carbon films for water environment applications (in Chinese, dissertation). Lanzhou: Lanzhou Institute of Chemical Physics, 2011.
[15]曾群锋, 刘官, 彭润玲, 等. 退火温度对DLC膜热稳定性及摩擦学性能的影响[J]. 真空科学与技术学报, 2015(5): 601−607.
ZENG Qunfeng, LIU Guan, PENG Runling, et al. Vac Sci Thchno (in Chinese), 2015(5): 601−607.
[16]WU D, REN S, PU J, et al. A comparative study of tribological characteristics of hydrogenated DLC film sliding against ceramic mating materials for helium applications[J]. Appl Surf Sci, 2018, 441: 884−894.
[17]ARSLAN A, MASJUKI H H, KALAM M A, et al. Investigation of laser texture density and diameter on the tribological behavior of hydrogenated DLC coating with line contact configuration[J]. Surf Coat Tech, 2017, 322: 31−37.
[18]ZHOU X, TUNMEE S, SUZUKI T, et al. Quantitative NEXAFS and solid-state NMR studies of sp3/(sp2+sp3) ratio in the hydrogenated DLC films[J]. Diam Relat Mater, 2017, 73: 232−240.
[19]TAKABAYASHI S, OKAMOTO K, SAKAUE H, et al. Annealing effect on the chemical structure of diamondlike carbon[J]. J Appl Phys, 2008, 104(4): 043512.
[20]HUANG L, YUAN J T, LI C, et al. Influence of annealing temperature on thermal stabilities of hydrogenated amorphous carbon on silicon nitride balls[J]. Vacuum, 2016, 127: 96−102.
[21]SANTIAGO J A, FERNANDEZ-MARTINEZ I, KOZAK T, et al. The influence of positive pulses on HiPIMS deposition of hard DLC coatings[J]. Surf Coat Tech, 2019, 358: 43−49.
[22]MARIANO S F M, UEDA M. Hollow cathode effects observed in magnetically confined plasmas used for deposition of DLC films via PIIID in tubes[J]. Appl Surf Sci, 2019, 465: 824−832.
[23]TAKIZAWA K, KUNITSUGU S. The relationship between characteristics of DLC film and electron temperature measured by optical emission spectroscopy[J]. IEEE T Plasma Sci, 2016, 44(12): 3207−3213.
[24]MODABBERASL A, KAMELI P, RANJBAR M, et al. Fabrication of DLC thin films with improved diamond-like carbon character by the application of external magnetic field[J]. Carbon, 2015, 94: 485−493.
[25]LEAL G, CARDOSO G W A, SOBRINHO A S D S, et al. Electrical and structural characterization of Sn-DLC thin films for piezoresistive sensors[C]//The 28th European Conference on Solid-State Transducers, Brescia, Italy, 2014: 120−123.
[26]ORWA J O, ANDRIENKO I, PENG J L, et al. Thermally induced sp2 clustering in tetrahedral amorphous carbon (ta-C) films[J]. J Appl Phys, 2004, 96(11): 6286−6297.
[27]CHOI W S, HONG B. The effect of annealing on the properties of diamond-like carbon protective antireflection coatings[J]. Renew Energ, 2008, 33(2): 226−231.
[28]YANG B, ZHENG Y, ZHANG B, et al. The high-temperature tribological properties of Si-DLC films[J]. Surf Interface Anal, 2012, 44(13): 1601−1605.
[29]SON M J, ZHANG T F, JO Y J, et al. Enhanced electrochemical properties of the DLC films with an arc interlayer, nitrogen doping and annealing[J]. Surf Coat Tech, 2017, 329: 77−85.
[30]NOBILI L, GUGLIELMINI A. Thermal stability and mechanical properties of fluorinated diamond-like carbon coatings[J]. Surf Coat Tech, 2013, 219: 144−150.
[31]ZOU C W, WANG H J, FENG L, et al. Effects of Cr concentrations on the microstructure, hardness, and temperature-dependent tribological properties of Cr-DLC coatings[J]. Appl Surf Sci, 2013, 286: 137−141.
[32]VEPREK S. Conventional and new approaches towards the design of novel superhard materials[J]. Surf Coat Tech, 1997, 97(1−3 pt 1): 15−22.
[33]BHOWMICK S, LOU M, KHAN M Z U, et al. Role of an oxygen atmosphere in high temperature sliding behaviour of W containing diamond-like carbon (W-DLC)[J]. Surf Coat Tech, 2017, 332: 399−407.
[34]CHOI J, MIYAGAWA S, NAKAO S, et al. Thermal stability of diamond-like carbon films deposited by plasma based ion implantation technique with bipolar pulses[J]. Diam Relat Mater, 2006, 15(4−8): 948−951.
[35]王林青, 周永涛, 王军军. 退火处理对DLC薄膜结构及摩擦学性能的影响[J]. 表面技术, 2019, 48(2): 133−138.
WANG Linqing, ZHOU Yongtao, WANG Junjun. Surf Tech (in Chinese), 2019, 48(2): 133−138. 
[36]TAKABAYASHI S, OKAMOTO K, NAKATANI T. Influence of post-annealing on a diamondlike carbon film analyzed by Raman spectroscopy[J]. Surf Interface Anal, 2018, 50(4): 441−447.
[37]PETER S, GÜNTHER M, GORDAN O, et al. Experimental analysis of the thermal annealing of hard α-C:H films[J]. Diam Relat Mater, 2014, 45: 43−57.
[38]SHENG R, LI L, SU D, et al. Effect of unbonded hydrogen on amorphous carbon film deposited by PECVD with annealing treatment[J]. Diam Relat Mater, 2018, 81: 146−153.
[39]BHARGAVA S, BIST H D, NARLIKAR A V, et al. Effect of substrate temperature and heat treatment on the microstructure of diamondlike carbon films[J]. J Appl Phys, 1996, 79(4): 1917.
[40]TAY B K, SHEEJA D, LAU S P, et al. Time and temperature-dependent changes in the structural properties of tetrahedral amorphous carbon films[J]. Surf Coat Tech, 2000, 130(2−3): 248−251.
[41]MURASHIMA M, DENG X, IZUOKA H, et al. Effect of oxygen on degradation of defects on ta-C coatings deposited by filtered arc deposition[J]. Surf Coat Tech, 2019, 362: 200−207.
[42]黄成浪. 中频磁控溅射以及ECR-CVD制备DLC薄膜的新工艺研究[D]. 深圳: 深圳大学, 2017.
HUANG Chenglang. The preparation of Diamond-like carbon using a combination of electron cyclotron resonance and medium frequency magnetron sputtering (in Chinese, dissertation). Shenzhen: Shenzhen University, 2017.
[43]HATADA R, BABA K, FLEGE S, et al. Long-term thermal stability of Si-containing diamond-like carbon films prepared by plasma source ion implantation[J]. Surf Coat Tech, 2016, 305: 93−98.
[44]FU R K Y, MEI Y F, FU M Y, et al. Thermal stability of metal-doped diamond-like carbon fabricated by dual plasma deposition[J]. Diam Relat Mater, 2005, 14(9): 1489−1493.
[45]WANG Z, WANG C, WANG Q, et al. Annealing effect on the microstructure modification and tribological properties of amorphous carbon nitride films[J]. J Appl Phys, 2008, 104(7): 73306.
[46]LIN Y, LIN H, LIU C, et al. Annealing effect on the structural, mechanical and electrical properties of titanium-doped diamond-like carbon films[J]. Thin Solid Films, 2009, 518(5): 1503−1507.
[47]MENG W J, TITTSWORTH R C, REHN L E. Mechanical properties and microstructure of TiC/amorphous hydrocarbon nanocomposite coatings[J]. Thin Solid Films, 2000, 377−378: 222−232.
[48]HUANG L, YUAN J T, LI C. Influence of titanium concentration on mechanical properties and wear resistance to Ti6Al4V of Ti-C:H on cemented carbide[J]. Vacuum, 2017, 138: 1−7.
[49]NI W, CHENG Y, WEINER A M, et al. Tribological behavior of diamond-like-carbon (DLC) coatings against aluminum alloys at elevated temperatures[J]. Surf Coat Tech, 2006, 201(6): 3229−3234.
[50]吴鹏. 类金刚石薄膜的性能及结构的研究[D]. 山东: 山东大学, 2009.
WU Peng. Study on properties and structure of the diamong-like carbon films (in Chinese, dissertation). Shandong: Shandong University, 2009.
[51]CHIU M, HSIEH W, HO W, et al. Thermal stability of Cr-doped diamond-like carbon films synthesized by cathodic arc evaporation[J]. Thin Solid Films, 2005, 476(2): 258−263.
[52]HAKOVIRTA M, VUORINEN J E, HE X M, et al. Heat capacity of hydrogenated diamond-like carbon films[J]. Appl Phys Lett, 2000, 77(15): 2340−2342.
[53]绳瑞达. 含氢类金刚石及其掺硅类的薄膜制备及性能研究[D]. 广州: 华南理工大学, 2018.
SHEN Ruida. Study on preparation and performance of hydrogenated diamond-like carbon films and its silicon doped films (in Chinese, dissertation). Guangzhou: South China University of Technology, 2018.
[54]WANG K. Mechano-activated electronic and molecular structures (in dissertation). College Station: Texas A&M University, 2009.
[55]WU J H, KARTHIKEYAN S, FALK M L, et al. Tribological characteristics of diamond-like carbon (DLC) based nanocomposite coatings[J]. Wear, 2005, 259: 744−751.
[56]PRICE M R, RAEYMAEKERS B. Quantifying adhesion of ultra-thin multi-layer DLC coatings to Ni and Si substrates using shear, tension, and nanoscratch molecular dynamics simulations[J]. Acta Mater, 2017, 141: 317−326.
[57]RAHMAN S M, SONG J, YEO C. Computational study on surface energy of amorphous DLC with respect to hybridization state of carbon and potential functions[J]. Diam Relat Mater, 2019, 95: 127−134.
[58]BERNAL R A, CHEN P, SCHALL J D, et al. Influence of chemical bonding on the variability of diamond-like carbon nanoscale adhesion[J]. Carbon, 2018, 128: 267−276.
[59]LOTFI R, JONAYAT A S M, Van DUIN A C T, et al. A reactive force field study on the interaction of lubricant with diamond-like carbon structures[J]. J Phys Chem C, 2016, 120(48): 27443−27451.
[60]马天宝, 胡元中, 王慧, 等. 基于原子运动模型的类金刚石薄膜生长机理研究[J]. 物理学报, 2007(1): 480−486.
MA Tianbao, HU Yuanzhong, WANG Hui, et al. J Phys (in Chinese), 2007(1): 480−486.
[61]LI X, KE P, LEE K, et al. Molecular dynamics simulation for the influence of incident angles of energetic carbon atoms on the structure and properties of diamond-like carbon films[J]. Thin Solid Films, 2014, 552: 136−140.
[62]陈羿男. 含氢类金刚石膜生长及摩擦机理研究[D]. 北京: 清华大学, 2015.
CHEN Yinan. Growth and friction mechanisms of hydrogenated diamond-like carbon films (in Chinese, dissertation). Beijing: Tsinghua University, 2015.
[63]HILBERT J, MANGOLINI F, MCCLIMON J B, et al. Si doping enhances the thermal stability of diamond-like carbon through reductions in carbon-carbon bond length disorder[J]. Carbon, 2018, 131: 72−78.
[64]WANG Y, XU J, ZHANG J, et al. Tribochemical reactions and graphitization of diamond-like carbon against alumina give volcano-type temperature dependence of friction coefficients: A tight-binding quantum chemical molecular dynamics simulation[J]. Carbon, 2018, 133: 350−357.
[65]王树峰. 基于分子动力学的磁盘保护薄膜摩擦学特性研究[D]. 哈尔滨: 哈尔滨工业大学, 2014.
WANG Shufeng. Tribological characteristics of disk protective film based on molecular dynamics (in Chinese, dissertation). Harbin: Harbin Institute of Technology, 2014.
[66]LI X, KE P, WANG A. Ab initio molecular dynamics simulation on stress reduction mechanism of Ti-doped diamond-like carbon films[J]. Thin Solid Films, 2015, 584: 204−207.
[67]LI X, SUN L, GUO P, et al. Structure and residual stress evolution of Ti/Al, Cr/Al or W/Al co-doped amorphous carbon nanocomposite films: Insights from ab initio calculations[J]. Mater Design, 2016, 89: 1123−1129.
[68]ZE S, DEJUN K. Effect of load on the friction-wear behavior of magnetron sputtered DLC film at high temperature[J]. Mater Res Express, 2017, 4(1): 016404.
[69]BANERJI A, BHOWMICK S, ALPAS A T. High temperature tribological behavior of W containing diamond-like carbon (DLC) coating against titanium alloys[J]. Surf Coat Tech, 2014, 241: 93−104.
[70]GREENWOOD O D, MOULZOLF S C, BLAU P J, et al. The influence of microstructure on tribological properties of WO3 thin films[J]. Wear, 1999, 232(1): 84−90.
[71]申锋涛. 掺杂非晶碳膜热磨损性能评定及磨损行为研究[D]. 西安: 西安理工大学, 2017.
SHEN Fengtao. Thermal wear performance evaluation and wear behavior study of doped amorphous carbon film (in Chinese, dissertation). Xi'an: Xi'an University of Technology, 2017.
[72]曾群锋, 董光能, 罗莉. 类金刚石膜的高温摩擦特性及热力学分析[J]. 材料热处理学报, 2014, 35(9): 151−155.
ZENG Qunfeng, DONG Guangneng, LUO Li. J Mater heat treat (in Chinese), 2014, 35(9): 151−155.
[73]ABDULLAH TASDEMIR H, WAKAYAMA M, TOKOROYAMA T, et al. The effect of oil temperature and additive concentration on the wear of non-hydrogenated DLC coating[J]. Tribol Int, 2014, 77: 65−71.
[74]MA T B, HU Y, WANG H. Molecular dynamics simulation of shear-induced graphitization of amorphous carbon films[J]. Carbon, 2009, 47(8): 1953−1957.
[75]王洋. 掺硅类金刚石膜的微观结构和摩擦学性能的分子动力学模拟研究[D]. 北京: 北京交通大学, 2010.
WANG Yang. Molecular dynamics simulation of the microstructure and tribological properties of diamond-like films doped with silicon (in Chinese, dissertation). Beijing: Beijing Jiaotong University, 2010.
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