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过渡层Cr/Cr-Si中Si含量对不锈钢表面生长金刚石薄膜的影响
作者: 晓1  成1 陈道勇2 陈成克1 李传星1 李吉泉3 蒋梅燕1 胡晓君1 
单位:(1. 浙江工业大学材料科学与工程学院 杭州 310014 2. 航天材料及工艺研究所 北京 100076  3. 浙江工业大学机械工程学院 杭州 310014) 
关键词:金刚石薄膜 不锈钢 过渡层 铬-硅 
分类号:TB383
出版年,卷(期):页码:2020,48(4):0-0
DOI:
摘要:

 摘  要:为了在不锈钢表面制备出高结合力的致密金刚石薄膜,采用磁控溅射制备了不同Si含量Cr/Cr-Si薄膜为过渡层,采用热丝化学气相沉积法制备金刚石薄膜。利用X射线衍射仪、扫描电子显微镜和Raman光谱等手段进行分析。结果表明,Si含量为12.7%(摩尔分数)时,Cr-Si层由Cr(Si)固溶体组成,Fe原子向外扩散速率降低,金刚石薄膜致密且与不锈钢之间的附着力优异。

 
基金项目:
浙江省自然科学基金项目(LY18E020013);国家自然科学基金重点项目(U1809210);国际科技合作项目(2014DFR51160);国家重点研发计划中欧国际合作项目(2016YFE0133200);欧盟地平线2020研究与创新人员交流计划(734578);浙江省重点研究发展计划一带一路国际合作项目(2018C04021);国家自然科学基金(51575491)。
作者简介:
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